The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Mar. 15, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Kyoko Ikeda, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/44 (2006.01); H01L 21/67 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4412 (2013.01); C23C 16/4584 (2013.01); C23C 16/4586 (2013.01); C23C 16/45546 (2013.01); C23C 16/45551 (2013.01); C23C 16/45578 (2013.01); H01J 37/3244 (2013.01); H01J 37/32458 (2013.01); H01J 37/32816 (2013.01); H01L 21/0228 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/68771 (2013.01);
Abstract
A gas supply member includes a straight flow path having a straight-line shape and a first end to be supplied with a gas, a gas discharge port branched from the straight flow path and a gas circulation path extending along an extension line of the straight flow path, connected to a second end of the straight flow path, and configured to collect foreign substances contained in the gas supplied to the straight flow path.