The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Apr. 25, 2018
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Kenji Furuta, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/03 (2006.01); B23K 26/53 (2014.01); G01B 11/06 (2006.01); B23K 26/046 (2014.01); B23K 26/08 (2014.01); G01B 7/02 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/03 (2013.01); B23K 26/046 (2013.01); B23K 26/083 (2013.01); B23K 26/53 (2015.10); G01B 7/02 (2013.01); G01B 11/0608 (2013.01); B23K 2103/56 (2018.08);
Abstract
Disclosed herein is an evaluation jig that is a jig to be used for evaluation of a height position detection unit that detects the height position of a holding surface of a chuck table of a laser processing apparatus. The evaluation jig includes a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a Z-axis direction, a base section that supports the actuator and is mounted on the holding surface of the chuck table, and a control unit that controls movement of the actuator.