The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Sep. 17, 2018
Applicant:
Fujimi Incorporated, Kiyosu, JP;
Inventors:
Yukinobu Yoshizaki, Kiyosu, JP;
Koichi Sakabe, Kiyosu, JP;
Satoru Yarita, Kiyosu, JP;
Kenichi Komoto, Kiyosu, JP;
Assignee:
FUJIMI INCORPORATED, Kiyosu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/50 (2006.01); C11D 3/37 (2006.01); C11D 11/00 (2006.01); C11D 3/20 (2006.01); C11D 7/26 (2006.01); H01L 21/3105 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 3/378 (2013.01); C11D 3/2065 (2013.01); C11D 3/2068 (2013.01); C11D 3/3707 (2013.01); C11D 3/3757 (2013.01); C11D 3/3765 (2013.01); C11D 7/261 (2013.01); C11D 7/263 (2013.01); C11D 7/265 (2013.01); C11D 7/266 (2013.01); C11D 11/0047 (2013.01); H01L 21/02065 (2013.01); H01L 21/31053 (2013.01);
Abstract
A surface treatment composition according to the present invention is used for treating a surface of a polished object to be polished which is obtained after polishing with a polishing composition including ceria, using the surface treatment composition including a (co)polymer having a monomer-derived structural unit having a carboxyl group or a salt group thereof, a residue removing accelerator composed of a specific compound having a hydroxyl group, and a dispersing medium, wherein pH is less than 7.