The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
May. 23, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Todd Egan, Fremont, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
Samer Banna, San Jose, CA (US);
Kyle Tantiwong, Livermore, CA (US);
Gregory Kirk, Pleasanton, CA (US);
Abraham Ravid, San Jose, CA (US);
Yaoming Shen, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A system for processing a substrate is provided. The system includes a process chamber including one or more sidewalls enclosing a processing region; and a substrate support. The system further includes a passageway connected to the process chamber; and a first particle detector disposed at a first location along the passageway. The first particle detector includes an energy source configured to emit a first beam; one or more optical devices configured to direct the first beam along one or more paths, where the one or more paths extend through at least a portion of the passageway. The first particle detector further includes a first energy detector disposed at a location other than on the one or more paths. The system further includes a controller configured to communicate with the first particle detector, wherein the controller is configured to identify a fault based on signals received from the first particle detector.