The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Oct. 16, 2018
Asml Netherlands B.v., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An acoustic scatterometerhas an acoustic sourceoperable to project acoustic radiationonto a periodic structureandformed on a substrate. An acoustic detectoris operable to detect the −1st acoustic diffraction orderdiffracted by the periodic structureandwhile discriminating from specular reflection (0th order). Another acoustic detectoris operable to detect the +1st acoustic diffraction orderdiffracted by the periodic structure, again while discriminating from the specular reflection (0th order). The acoustic source and acoustic detector may be piezo transducers. The angle of incidence of the projected acoustic radiationand location of the detectorsandare arranged with respect to the periodic structureandsuch that the detection of the −1st and +1st acoustic diffraction ordersanddiscriminates from the 0th order specular reflection