The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2020

Filed:

Dec. 05, 2016
Applicant:

Haesung Ds Co., Ltd., Changwon-si, KR;

Inventors:

In Seob Bae, Changwon-si, KR;

Hyeok Jin Jeon, Changwon-si, KR;

Assignee:

HAESUNG DS CO., LTD., Changwon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/14 (2006.01); H01L 21/324 (2006.01); H01L 21/768 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 23/142 (2013.01); H01L 21/324 (2013.01); H01L 21/76831 (2013.01); H01L 23/3178 (2013.01);
Abstract

A method of manufacturing a semiconductor package substrate includes forming a trench in one surface of a base substrate formed of a conductive material, performing a first filling operation of filling the trench with resin, performing a first curing operation of semi-curing the resin filled in the first filling operation, performing a second filling operation of additionally filling resin on a semi-cured resin, performing a second curing operation of fully curing the resin, removing the resin exposed from the trench, and etching an opposite surface of the base substrate to expose at least part of the resin filling the trench.


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