The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Oct. 26, 2018
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Injo Ok, Loudonville, NY (US);
Myung-Hee Na, Lagrangeville, NY (US);
Nicole Saulnier, Slingerlands, NY (US);
Balasubramanian Pranatharthiharan, Watervliet, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); H01L 27/24 (2006.01);
U.S. Cl.
CPC ...
H01L 45/1675 (2013.01); H01L 27/2463 (2013.01); H01L 45/06 (2013.01); H01L 45/1253 (2013.01); H01L 45/145 (2013.01);
Abstract
A self-align metal contact for a phase control memory (PCM) element is provided that mitigates unwanted residual tantalum nitride (TaN) particles that would otherwise remain after patterning a TaN surface using an RIE process.