The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Jan. 07, 2019
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Hari Prasad Amanapu, Guilderland, NY (US);
Raghuveer Patlolla, Guilderland, NY (US);
Cornelius Brown Peethala, Slingerlands, NY (US);
Michael Rizzolo, Delmar, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/22 (2006.01); H01L 43/02 (2006.01); H01L 43/08 (2006.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
H01L 27/222 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01); H01L 43/12 (2013.01);
Abstract
A substantially flat bottom electrode embedded in a dielectric for magnetoresistive random access memory (MRAM) devices includes pre-filling the contact via prior to filling the trench with tantalum nitride in a via/trench structure. The top surface of the substantially flat bottom electrode is coplanar to the top surface of the dielectric.