The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Nov. 01, 2018
Globalfoundries Inc., Grand Cayman, KY;
Nicholas V. LiCausi, Watervliet, NY (US);
Chanro Park, Clifton Park, NY (US);
Ruilong Xie, Niskayuna, NY (US);
Andre P. Labonte, Mechanicville, NY (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
An interconnect structure of an integrated circuit and a method of forming the same, the interconnect structure including: at least two metal lines laterally spaced from one another in a dielectric layer, the metal lines having a top surface below a top surface of the dielectric layer; a hardmask layer on an upper portion of sidewalls of the metal lines, the hardmask layer having a portion extending between the metal lines, the extending portion being below the top surface of the metal lines; and at least one fully aligned via on the top surface of a given metal line.