The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2020

Filed:

Jan. 08, 2020
Applicant:

United Semiconductor (Xiamen) Co., Ltd., Xiamen, Fujian, CN;

Inventors:

Sheng-Hsu Liu, Changhua County, TW;

Shih-Hsien Huang, Kaohsiung, TW;

Wen Yi Tan, Fujian, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01); H01L 29/165 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78 (2013.01); H01L 21/02529 (2013.01); H01L 21/02532 (2013.01); H01L 21/306 (2013.01); H01L 29/165 (2013.01); H01L 29/1608 (2013.01); H01L 29/6656 (2013.01);
Abstract

A fabricating method of a transistor structure includes providing a substrate with a doped well disposed within the substrate. Later, a gate structure is formed to be disposed on the doped well. Next, a hexagonal-shaped trench is formed to be embedded in the doped well at one side of the gate structure. Subsequently, a first epitaxial layer is formed to be disposed inside the hexagonal-shaped trench and contact the hexagonal-shaped trench, wherein the first epitaxial layer includes first type dopants. Finally, a second epitaxial layer including second-type dopants is formed to be disposed in the hexagon-shaped trench, wherein the first epitaxial layer surrounds the second epitaxial layer, the second epitaxial layer serves as a source/drain doped region of the transistor structure, and the first-type dopants and the second-type dopants are different conductive types.


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