The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Apr. 02, 2016
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Daniel Chavez-Clemente, Chandler, AZ (US);
Joshua D. Heppner, Chandler, AZ (US);
Naida Duranovic, Chandler, AZ (US);
Assignee:
INTEL CORPORATION, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 23/00 (2006.01); H01L 23/538 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); H01L 21/68721 (2013.01); H01L 21/68728 (2013.01); H01L 24/75 (2013.01); H01L 23/5387 (2013.01); H01L 2224/7598 (2013.01); H01L 2224/75704 (2013.01); H01L 2224/75901 (2013.01);
Abstract
A substrate retention plate system for holding a substrate for processing in an electronic device manufacturing process is described. The retention plate system includes a top plate and a bottom plate to sandwich a flexible substrate. Additionally, the top plate includes a number of cams to stretch the flexible substrate across the bottom plate.