The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Apr. 12, 2018
Asml Netherlands B.v., Veldhoven, NL;
Everhardus Cornelis Mos, Best, NL;
Jochem Sebastiaan Wildenberg, Aarle-Rixtel, NL;
Marcel Hendrikus Maria Beems, Veldhoven, NL;
Erik Johannes Maria Wallerbos, Helmond, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of monitoring a device manufacturing process, the method including; obtaining an estimated time variation of a process parameter; determining, on the basis of the estimated time variation, a sampling plan for measurements to be performed on a plurality of substrates to obtain information about the process parameter; measuring substrates in accordance with the sampling plan to obtain a plurality of measurements; and determining an actual time variation of the process parameter on the basis of the measurements.