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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10809209 B1

PDFFull Text
Date of Patent:
Oct. 20, 2020

Filed:

Sep. 12, 2019

Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method

Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Hirotomo Yashima, Yokohama, JP;

Fuminori Hayano, Tokyo, JP;

Akitoshi Kawai, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:

Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.

Primary Examiner:

Kiho Kim

Int. Cl.
CPC ...
G21K 5/08 (2006.01); G01N 23/083 (2018.01); G06T 7/00 (2017.01); G01N 23/046 (2018.01); G01B 15/04 (2006.01); G01B 15/02 (2006.01);
U.S. Cl.
CPC ...
G01N 23/083 (2013.01); G01B 15/025 (2013.01); G01B 15/045 (2013.01); G01N 23/046 (2013.01); G06T 7/0008 (2013.01); G01B 2210/52 (2013.01); G01N 2223/419 (2013.01); G06T 2207/10116 (2013.01); G06T 2207/30108 (2013.01);
Abstract

A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.

Find Patent Forward Citations

Yashima, Hirotomo. (2020). Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method (U.S. Patent No. 10809209). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10809209

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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