The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Sep. 12, 2019
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/08 (2006.01); G01N 23/083 (2018.01); G06T 7/00 (2017.01); G01N 23/046 (2018.01); G01B 15/04 (2006.01); G01B 15/02 (2006.01);
U.S. Cl.
CPC ...
G01N 23/083 (2013.01); G01B 15/025 (2013.01); G01B 15/045 (2013.01); G01N 23/046 (2013.01); G06T 7/0008 (2013.01); G01B 2210/52 (2013.01); G01N 2223/419 (2013.01); G06T 2207/10116 (2013.01); G06T 2207/30108 (2013.01);
Abstract
A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.