The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Apr. 17, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Meliha Gozde Rainville, Lake Oswego, OR (US);
Nagraj Shankar, Tualatin, OR (US);
Kapu Sirish Reddy, Portland, OR (US);
Dennis M. Hausmann, Lake Oswego, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/768 (2006.01); C23C 16/52 (2006.01); H01L 23/532 (2006.01); C23C 16/40 (2006.01); H01J 37/32 (2006.01); H01L 21/311 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01); C23C 22/05 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76834 (2013.01); C23C 16/403 (2013.01); C23C 16/4554 (2013.01); C23C 16/45589 (2013.01); C23C 16/52 (2013.01); C23C 22/05 (2013.01); H01J 37/32917 (2013.01); H01L 21/02178 (2013.01); H01L 21/02205 (2013.01); H01L 21/31116 (2013.01); H01L 21/31144 (2013.01); H01L 23/53295 (2013.01); H01L 21/76807 (2013.01); H01L 21/76829 (2013.01); H01L 21/76832 (2013.01); H01L 23/53209 (2013.01); H01L 23/53228 (2013.01); H01L 23/53257 (2013.01);
Abstract
Aluminum oxide films with a thickness of between about 10-50 Å, characterized by a dielectric constant (k) of less than about 7 (such as about 4-6) and having a density of at least about 2.5 g/cm(such as about 3.0-3.2 g/cm) are deposited on partially fabricated semiconductor devices over a metal (e.g., cobalt or copper) such that the metal does not show signs of oxidation. In some embodiments, the films are etch stop films.