The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2020

Filed:

Oct. 17, 2018
Applicant:

Samsung Sdi Co., Ltd., Yongin-si, KR;

Inventors:

Jin-Hee Bae, Suwon-si, KR;

Taeksoo Kwak, Suwon-si, KR;

Byeonggyu Hwang, Suwon-si, KR;

Kunbae Noh, Suwon-si, KR;

Jun Sakong, Suwon-si, KR;

Jinwoo Seo, Suwon-si, KR;

Junyoung Jang, Suwon-si, KR;

Assignee:

Samsung SDI Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C01B 21/068 (2006.01); C09D 183/16 (2006.01); C08G 77/62 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02164 (2013.01); C01B 21/068 (2013.01); C09D 183/16 (2013.01); H01L 21/02214 (2013.01); H01L 21/02216 (2013.01); H01L 21/02222 (2013.01); C08G 77/62 (2013.01); H01L 21/02282 (2013.01);
Abstract

A composition for forming a silica layer includes a silicon-containing polymer and a solvent, the composition having a SiOconversion rate of greater than about 0 and less than or equal to about 15. The SiOconversion rate is represented by: SiOconversion rate=(a ratio of an area of Si—O to an area of Si—H measured after coating the composition in a thickness of 6700 Å on a bare wafer, and allowing the coated wafer to stand for 24 hours under conditions of a temperature of 85° C. and a relative humidity of 85%)−(a ratio of an area of Si—O to an area of Si—H measured after coating the composition in a thickness of 6700 Å on a bare wafer, and allowing the coated wafer to stand for 2 hours under conditions of a temperature of 85° C. and a relative humidity of 85%).


Find Patent Forward Citations

Loading…