The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Mar. 17, 2017
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
King Pui Leung, Fort Lee, NJ (US);
Tao Chen, New City, NY (US);
Ronan James Havelin, Norwalk, CT (US);
Igor Matheus Petronella Aarts, Port Chester, NY (US);
Adel Joobeur, Milford, CT (US);
Joseph Carbone, Southport, CT (US);
Assignee:
ASML Holding N.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/02 (2006.01); G02F 1/365 (2006.01); G03F 9/00 (2006.01); G01B 11/02 (2006.01); G02B 6/122 (2006.01); G02B 6/27 (2006.01); G02B 6/293 (2006.01); G02F 1/35 (2006.01);
U.S. Cl.
CPC ...
G02B 6/02004 (2013.01); G01B 11/02 (2013.01); G02B 6/1228 (2013.01); G02B 6/2746 (2013.01); G02B 6/29377 (2013.01); G02F 1/365 (2013.01); G03F 9/7065 (2013.01); G01B 2210/56 (2013.01); G02F 2001/3528 (2013.01);
Abstract
A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.