The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Nov. 02, 2017
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Shintaro Yamada, Shrewsbury, MA (US);
Li Cui, Westborough, MA (US);
Christopher Gilmore, Natick, MA (US);
Joshua A. Kaitz, Watertown, MA (US);
Sheng Liu, Bow, NH (US);
James F. Cameron, Brookline, MA (US);
Suzanne M. Coley, Mansfield, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); G03F 7/11 (2006.01); C09D 171/00 (2006.01); H01L 21/033 (2006.01); H01L 21/308 (2006.01); G03F 7/09 (2006.01); G03F 7/075 (2006.01); G03F 7/30 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); H01L 21/311 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0276 (2013.01); C09D 171/00 (2013.01); G03F 7/0752 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01); H01L 21/0332 (2013.01); H01L 21/3081 (2013.01); G03F 7/16 (2013.01); G03F 7/20 (2013.01); G03F 7/30 (2013.01); H01L 21/3065 (2013.01); H01L 21/31116 (2013.01); H01L 21/31138 (2013.01);
Abstract
Aromatic resin polymers and compositions containing them are useful as underlayers in semiconductor manufacturing processes.