IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10788751 B1

PDFFull Text
Date of Patent:
Sep. 29, 2020

Filed:

Aug. 31, 2016

Coating composition for use with an overcoated photoresist

Applicants:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Rohm and Haas Electronic Materials Korea Ltd., Cheonan, Chungcheongnam-Do, KR;

Inventors:

Matthew Grandbois, Marlborough, MA (US);

Myung Yeol Kim, Chungcheongnam-Do, KR;

Eui Hyun Ryu, Chungcheongnam-Do, KR;

Jae Hwan Sim, Chungcheongnam-Do, KR;

Min Kyung Jang, Chungcheongnam-Do, KR;

Jung-June Lee, Chungcheongnam-Do, KR;

Assignees:

Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);

Rohm and Haas Electronic Materials Korea Ltd., Cheonan, Chungcheongnam-do, KR;

Attorneys:

Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.

Peter F. Corless

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/09 (2006.01); C09D 167/00 (2006.01); C09D 5/00 (2006.01); C07D 487/04 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/308 (2006.01); C08L 61/06 (2006.01); C08G 8/04 (2006.01); C08K 5/3445 (2006.01);
U.S. Cl.
CPC ...
G03F 7/091 (2013.01); C07D 487/04 (2013.01); C08G 8/04 (2013.01); C08L 61/06 (2013.01); C09D 5/006 (2013.01); C09D 167/00 (2013.01); G03F 7/11 (2013.01); H01L 21/0274 (2013.01); H01L 21/0276 (2013.01); H01L 21/02112 (2013.01); H01L 21/02282 (2013.01); H01L 21/3081 (2013.01); C08K 5/3445 (2013.01);
Abstract

Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a crosslinker component that comprises a structure of the following Formula (I):

Find Patent Forward Citations

Loading…