The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Nov. 29, 2016
Applicant:
Hitachi High-technologies Corporation, Tokyo, JP;
Inventors:
Takeshi Sunaoshi, Tokyo, JP;
Yoshihisa Orai, Tokyo, JP;
Haruhiko Hatano, Tokyo, JP;
Takashi Mizuo, Tokyo, JP;
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F25B 19/00 (2006.01); F25B 9/00 (2006.01); B01D 8/00 (2006.01); A61B 18/02 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); F25B 19/005 (2013.01); H01J 37/28 (2013.01); H01J 2237/002 (2013.01); H01J 2237/028 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/262 (2013.01); H01J 2237/28 (2013.01);
Abstract
The invention is directed to a charged particle beam apparatus that enables temperature maintenance in a cooling unit provided inside a vacuum application apparatus using a refrigerant. The charged particle beam apparatus includes a cooling tank that contains a refrigerant for cooling a cooling unit, a cooling pipe that supplies the refrigerant from the cooling tank to the cooling unit, and a unit that leads the refrigerant to liquefy when the refrigerant is biased to a solid.