The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Sep. 11, 2018
Applicant:
Fujimi Incorporated, Aichi, JP;
Inventors:
Assignee:
FUJIMI INCORPORATED, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/60 (2006.01); C11D 7/32 (2006.01); C11D 11/00 (2006.01); C11D 7/34 (2006.01); C11D 7/26 (2006.01); H01L 21/02 (2006.01); C11D 3/37 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3245 (2013.01); C11D 3/378 (2013.01); C11D 7/265 (2013.01); C11D 7/34 (2013.01); C11D 11/0047 (2013.01); H01L 21/02065 (2013.01); H01L 21/02068 (2013.01); H01L 21/31053 (2013.01);
Abstract
The composition for surface treatment according to the present invention includes a carboxylic acid compound having two or more nitrogen atoms, an ionic dispersing agent, and water, has a pH of less than 6, and is used for treating a surface of a polished object having a tungsten-containing layer.