The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2020

Filed:

Oct. 29, 2018
Applicant:

Lumetrics, Inc., Rochester, NY (US);

Inventors:

Michael A. Marcus, Honeoye Falls, NY (US);

Kyle J. Hadcock, Webster, NY (US);

Donald S. Gibson, West Henrietta, NY (US);

Filipp V. Ignatovich, Rochester, NY (US);

Assignee:

Lumetrics, Inc., Rochester, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/45 (2006.01); G01N 21/41 (2006.01); G01B 11/06 (2006.01); G01B 9/02 (2006.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
G01N 21/45 (2013.01); G01B 9/02004 (2013.01); G01B 9/02007 (2013.01); G01B 9/0209 (2013.01); G01B 11/0675 (2013.01); G01N 21/4133 (2013.01); G01B 2290/45 (2013.01); G01B 2290/60 (2013.01); G01N 2021/458 (2013.01); G01N 2021/8438 (2013.01);
Abstract

A method of identifying the material and determining the physical thickness of each layer in a multilayer structure is disclosed. The method includes measuring the optical thickness of each of the layers of the multilayer object as a function of wavelength of a light source and calculating a normalized group index of refraction dispersion curve for each layer in the multilayer structure. The measured normalized group index of refraction dispersion curves for each of the layers is then compared to a reference database of known materials and the material of each layer is identified. The physical thickness of each layer is then determined from the group index of refraction dispersion curve for the material in each layer and the measured optical thickness data. A method for determining the group index of refraction dispersion curve of a known material, and an apparatus for performing the methods are also disclosed.


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