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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10752995 B1

PDFFull Text
Date of Patent:
Aug. 25, 2020

Filed:

Feb. 24, 2017

Material delivery system and method

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Ke-Chih Liu, Hsinchu, TW;

Chia-Ming Tsai, Zhubei, TW;

Yen-Yu Chen, Taichung, TW;

Yueh-Ching Pai, Taichung, TW;

Yu-Min Chang, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Brian W Jennison

Int. Cl.
CPC ...
C23C 16/52 (2006.01); H01L 21/02 (2006.01); C23C 16/448 (2006.01); H01L 21/67 (2006.01); C23C 16/46 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/4481 (2013.01); C23C 16/4482 (2013.01); C23C 16/46 (2013.01); H01L 21/02104 (2013.01); H01L 21/67248 (2013.01); H01L 22/12 (2013.01);
Abstract

A method includes applying a first amount of heat to a vapor region of a precursor canister, measuring an indication of saturated vapor pressure within the vapor region during the applying the first amount of heat, and applying a second amount of heat to the vapor region of the precursor canister, the second amount of heat being adjusted from the first amount of heat based on the indication of saturated vapor pressure.

Find Patent Forward Citations

Liu, Ke-Chih. (2020). Material delivery system and method (U.S. Patent No. 10752995). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10752995

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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