The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Sep. 08, 2017
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Kota Sotoku, Kyoto, JP;
Toyohide Hayashi, Kyoto, JP;
Akito Hatano, Kyoto, JP;
Takayuki Gohara, Kyoto, JP;
Hiroaki Takahashi, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67167 (2013.01); H01L 21/6719 (2013.01); H01L 21/67109 (2013.01); H01L 21/67178 (2013.01); H01L 21/67196 (2013.01); H01L 21/67207 (2013.01); H01L 21/67748 (2013.01); H01L 21/68742 (2013.01);
Abstract
A substrate processing apparatus including a plurality of baking chambers stacked in a prescribed direction, each baking chamber carrying out heat treatment of a substrate in its interior, a processing unit having a liquid processing chamber separate from the baking chambers and carrying out liquid processing of the substrate using the processing liquid, and an enclosing isolating space that encloses the sides of the plurality of baking chambers and isolates the baking chambers from the surrounding area.