The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Oct. 02, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventor:
Barry Blasenheim, Campbell, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2006.01); G02B 7/182 (2006.01); G01N 21/21 (2006.01); G01N 21/47 (2006.01); G01N 21/95 (2006.01); G01N 21/84 (2006.01); G01N 21/93 (2006.01);
U.S. Cl.
CPC ...
G02B 17/00 (2013.01); G01N 21/211 (2013.01); G01N 21/47 (2013.01); G01N 21/8422 (2013.01); G01N 21/9501 (2013.01); G02B 7/182 (2013.01); G01N 21/93 (2013.01); G01N 2021/213 (2013.01); G01N 2201/0636 (2013.01);
Abstract
A lens system includes a curved primary mirror and an aspheric secondary mirror. The aspheric secondary mirror has a diameter smaller than that of the primary mirror and shares an optical axis with the primary mirror. The aspheric secondary mirror and the primary mirror are rotationally symmetric with respect to the optical axis. A support member, which may be transparent over an operating wavelength of the lens system, is disposed on the aspheric secondary mirror.