The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2020

Filed:

Oct. 06, 2017
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Shih-Hsien Huang, Renwu Township, TW;

Yi-Fang Pai, Hsinchu, TW;

Chien-Chang Su, Kaohsiung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/417 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7833 (2013.01); H01L 21/02636 (2013.01); H01L 29/0692 (2013.01); H01L 29/66628 (2013.01); H01L 29/66636 (2013.01); H01L 29/165 (2013.01); H01L 29/41725 (2013.01); H01L 29/41783 (2013.01); H01L 29/7848 (2013.01);
Abstract

The integrated circuit includes a gate structure over a substrate. The integrated circuit further includes a first silicon-containing material structure in a recess adjacent to the gate structure. The first silicon-containing material structure includes a first layer having an uppermost surface below a top surface of the substrate and a bottommost surface in contact with the substrate. The first silicon-containing material structure further includes a second layer over the first layer, wherein an entirety of the second layer is co-planar with or above the top surface of the substrate. A first region of the second layer closer to the gate structure is thicker than a second region of the second layer farther from the gate structure. Thickness is measured in a direction perpendicular to the top surface of the substrate.


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