The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2020
Filed:
Jul. 19, 2016
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
Krishanu Shome, Cheshire, CT (US);
Justin Lloyd Kreuzer, Trumbull, CT (US);
Assignee:
ASML Holding N.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/30 (2006.01); G03F 9/00 (2006.01); G02B 27/09 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7065 (2013.01); G02B 5/30 (2013.01); G02B 27/0977 (2013.01);
Abstract
An optical system for improving alignment measurement accuracy is discussed. The optical system includes first and second optical elements. The first optical element may be configured to change a first beam having a first polarization state into a second beam having a second polarization state. The second optical element may be configured to provide total internal reflection of the second beam and to change the second beam into a third beam having a third polarization state. The first, second, and third polarization states may be different from each other.