The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2020
Filed:
Oct. 31, 2017
Corning Incorporated, Corning, NY (US);
Chong Pyung An, Painted Post, NY (US);
Uta-Barbara Goers, Campbell, NY (US);
En Hong, Painted Post, NY (US);
Sung-chan Hwang, Cheonal-si, KR;
Ji Hwa Jung, Seoul, KR;
Tae-ho Keem, Seongnam-si, KR;
Philip Robert LeBlanc, Corning, NY (US);
Hyeong-cheol Lee, Cheonan-si, KR;
Michal Mlejnek, Big Flats, NY (US);
Johannes Moll, Corning, NY (US);
Rajeshkannan Palanisamy, Painted Post, NY (US);
Sung-jong Pyo, Asan-si, KR;
Amanda Kathryn Thomas, Corning, NY (US);
Correy Robert Ustanik, Davidson, NC (US);
Corning Incorporated, Corning, NY (US);
Abstract
A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.