The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2020
Filed:
Jan. 16, 2019
Asml Netherlands B.v., Veldhoven, NL;
Seerwan Saeed, Veldhoven, NL;
Petrus Martinus Gerardus Johannes Arts, Echt, NL;
Harold Sebastiaan Buddenberg, Sittard, NL;
Erik Henricus Egidius Catharina Eummelen, Veldhoven, NL;
Giovanni Luca Gattobigio, Eindhoven, NL;
Floor Lodewijk Keukens, Turnhout, BE;
Ferdy Migchelbrink, Veldhoven, NL;
Jeroen Arnoldus Leonardus Johannes Raaymakers, Oirschot, NL;
Arnoldus Johannes Martinus Jozeph Ras, Mierlo, NL;
Gheorghe Tanasa, Eindhoven, NL;
Jimmy Matheus Wilhelmus Van De Winkel, Kessel, NL;
Daan Daniel Johannes Antonius Van Sommeren, Beuningen, NL;
Marijn Wouters, Utrecht, NL;
Miao Yu, Best, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus, an illumination device, such as light emitting diodes, embedded in the body, a sensor, such as an imaging device or a pressure sensor, that is embedded in the body and configured to generate inspection information, such as image data, relating to a parameter of the component of the apparatus proximate to the inspection substrate, and a storage device embedded in the body and configured to store the inspection information.