logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10712677 B1

PDFFull Text
Date of Patent:
Jul. 14, 2020

Filed:

Nov. 21, 2018

Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning

Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Irene Ament, Aalen, DE;

Dirk Heinrich Ehm, Beckingen, DE;

Stefan Wolfgang Schmidt, Aalen, DE;

Moritz Becker, Aalen, DE;

Stefan Wiesner, Lauchheim, DE;

Diana Urich, Munich, DE;

Assignee:

CARL ZEISS SMT GMBH, Oberkochen, DE;

Attorney:

Edell, Shapiro & Finnan, LLC

Primary Examiner:

Peter B Kim

Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70925 (2013.01); B08B 7/0035 (2013.01); G03F 7/70033 (2013.01); G03F 7/70883 (2013.01); G03F 7/70916 (2013.01); G03F 7/70933 (2013.01);
Abstract

A projection exposure apparatus () for semiconductor lithography contains at least one partial volume () that is closed off from the surroundings. The partial volume () contains a gas, from which a plasma can be produced. Conditioning elements () for conditioning the plasma, in particular for neutralizing the plasma, are present in the partial volume. An associated method for operating a projection exposure apparatus is also disclosed.

Find Patent Forward Citations

Ament, Irene. (2020). Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning (U.S. Patent No. 10712677). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10712677

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…