The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
Jun. 15, 2012
Applicants:
Suvi Haukka, Helsinki, FI;
Viljami J. Pore, Helsinki, FI;
Antti Niskanen, Helsinki, FI;
Inventors:
Assignee:
ASM International N.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/205 (2006.01); H01L 21/02 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01); C30B 25/14 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2056 (2013.01); C23C 16/303 (2013.01); C23C 16/4554 (2013.01); C30B 25/14 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02579 (2013.01);
Abstract
Atomic layer deposition (ALD) processes for forming thin films comprising InN are provided. The thin films may find use, for example, in light-emitting diodes.