The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2020

Filed:

Jul. 12, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Christopher Dennis Bencher, Cupertino, CA (US);

Joseph R. Johnson, Redwood City, CA (US);

David Markle, Pleasanton, CA (US);

Mehdi Vaez-Iravani, Los Gatos, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 27/28 (2006.01); G02B 26/08 (2006.01); G02B 5/30 (2006.01); G02F 1/13 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70291 (2013.01); G02B 27/283 (2013.01); G03F 7/2008 (2013.01); G03F 7/2057 (2013.01); G03F 7/70275 (2013.01); G03F 7/70566 (2013.01); G02B 5/3083 (2013.01); G02B 26/0833 (2013.01); G02F 1/1303 (2013.01);
Abstract

Embodiments of the present disclosure provide methods for producing images on substrates. The method includes providing a p-polarization beam to a first mirror cube having a first digital micromirror device (DMD), providing an s-polarization beam to a second mirror cube having a second DMD, and reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on the substrate.


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