The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2020
Filed:
Feb. 28, 2019
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/24 (2006.01); H01J 37/244 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); G01N 23/04 (2018.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); G01N 23/04 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); G01N 2223/401 (2013.01); G01N 2223/418 (2013.01); H01J 2237/22 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/2802 (2013.01);
Abstract
A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: