The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2020

Filed:

Mar. 27, 2018
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Peijie Feng, San Diego, CA (US);

Junjing Bao, San Diego, CA (US);

Ye Lu, San Diego, CA (US);

Giridhar Nallapati, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 28/88 (2013.01); H01L 23/5223 (2013.01); H01L 23/5226 (2013.01);
Abstract

A capacitor includes first conductive fingers interdigitated with second conductive fingers at an Mx interconnect level, and third conductive fingers interdigitated with fourth conductive fingers at an Mx-1 interconnect level. The third conductive fingers are offset from the first conductive fingers. The second conductive fingers are offset from the fourth conductive fingers. The capacitor further includes fifth conductive fingers interdigitated with sixth conductive fingers at an Mx-2 interconnect level. The fifth conductive fingers are offset from the third conductive fingers. The sixth conductive fingers are offset from the fourth conductive fingers. The capacitor further includes seventh conductive fingers interdigitated with eighth conductive fingers at an Mx-3 interconnect level. The seventh conductive fingers are offset from the fifth conductive fingers. The eighth conductive fingers are offset from the sixth conductive fingers. A first set of vias electrically couples the first conductive fingers to the fifth conductive fingers.


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