The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2020

Filed:

Oct. 15, 2018
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Yu-Wei Jiang, Hsinchu, TW;

Chieh-Fang Chen, Zhubei, CN;

Jia-Rong Chiou, Zhubei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 21/822 (2006.01); H01L 21/8234 (2006.01); H01L 27/11521 (2017.01); H01L 27/11556 (2017.01); H01L 27/11568 (2017.01); H01L 27/11582 (2017.01); G11C 5/02 (2006.01); G11C 5/06 (2006.01); G11C 5/12 (2006.01); G11C 16/04 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); G11C 5/025 (2013.01); G11C 5/06 (2013.01); G11C 5/12 (2013.01); G11C 16/0483 (2013.01); H01L 21/76 (2013.01); H01L 21/8221 (2013.01); H01L 21/8234 (2013.01); H01L 27/11556 (2013.01); H01L 27/11568 (2013.01); H01L 27/11582 (2013.01);
Abstract

A 3D memory device includes a substrate, a plurality of conductive layers, a plurality of insulating layers, a memory layer and a channel layer. The insulating layers are alternately stacked with the conductive layers on the substrate to form a multi-layers stacking structure, wherein the multi-layers stacking structure has at least one trench penetrating through the insulating layers and the conductive layers. The memory layer covers on the multi-layers stacking structure and at least extends onto a sidewall of the trench. The cannel layer covers on the memory layer and includes an upper portion adjacent to an opening of the trench, a lower portion adjacent to a bottom of the trench and a string portion disposed on the sidewall, wherein the string portion connects the upper portion with the lower portion and has a doping concentration substantially lower than that of the upper portion and lower portion.


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