The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Oct. 31, 2017
Applicant:

Corning Incorporated, Corning, NY (US);

Inventors:

Uta-Barbara Goers, Campbell, NY (US);

En Hong, Painted Post, NY (US);

Sung-chan Hwang, Cheonal-si, KR;

Ji Hwa Jung, Seoul, KR;

Tae-ho Keem, Seongnam-si, KR;

Philip Robert LeBlanc, Corning, NY (US);

Rajeshkannan Palanisamy, Painted Post, NY (US);

Sung-jong Pyo, Asan-si, KR;

Correy Robert Ustanik, Davidson, NC (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/896 (2006.01); G02B 7/182 (2006.01); G02B 21/18 (2006.01); G02B 21/10 (2006.01);
U.S. Cl.
CPC ...
G01N 21/896 (2013.01); G02B 7/1821 (2013.01); G02B 21/10 (2013.01); G02B 21/18 (2013.01); G01N 2021/8967 (2013.01); G01N 2201/0636 (2013.01);
Abstract

A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.


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