The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Sep. 30, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Ching-Chung Hsu, Taichung, TW;

Chung-Long Chang, Hsinchu, TW;

Tsung-Yu Yang, Zhubei, TW;

Hung-Chi Li, Taipei, TW;

Cheng-Chieh Hsieh, Tainan, TW;

Che-Yung Lin, Hsinchu, TW;

Grace Chang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01F 27/28 (2006.01); H01L 23/00 (2006.01); H01F 27/29 (2006.01); H01F 27/24 (2006.01); H01L 21/768 (2006.01); H05K 1/18 (2006.01); H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01L 21/321 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 28/10 (2013.01); H01F 27/24 (2013.01); H01F 27/2804 (2013.01); H01F 27/29 (2013.01); H01L 21/76843 (2013.01); H01L 21/76895 (2013.01); H01L 23/528 (2013.01); H01L 23/5227 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/81 (2013.01); H05K 1/181 (2013.01); H01L 21/0273 (2013.01); H01L 21/3212 (2013.01); H01L 21/7684 (2013.01); H01L 2224/13025 (2013.01); H01L 2224/16227 (2013.01); H01L 2924/19042 (2013.01); H01L 2924/19104 (2013.01); H05K 2201/1003 (2013.01);
Abstract

A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.


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