The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Jan. 29, 2016
Koh Young Technology Inc., Seoul, KR;
Seung Ae Seo, Hwaseong-si, KR;
Yeon Hee Lee, Seoul, KR;
Won Mi Ahn, Goyang-si, KR;
Hye In Lee, Gwangmyeong-si, KR;
Jong Hui Lee, Seoul, KR;
KOH YOUNG TECHNOLOGY INC., Seoul, KR;
Abstract
A substrate inspection system and substrate inspection method for setting an inspection region having a three-dimensional shape and/or a two-dimensional arbitrary shape as a region of interest on an image of a substrate. The substrate inspection method includes: generating and displaying a 2D image of a substrate based on image data acquired from the substrate having an inspection object; receiving first input information including arbitrary point data or line data for setting a region of interest at a plurality of particular positions of the 2D image from a user; and displaying the region of interest corresponding to the point data or the line data as a 2D region of interest having an arbitrary shape in accordance with the first input information.