The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Mar. 01, 2016
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yuan-Chun Wu, Shanghai, CN;

Chang-Chun Xu, Shanghai, CN;

Ni Shen, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01R 1/073 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2891 (2013.01); G01R 31/2831 (2013.01); G01R 31/2884 (2013.01); H01L 22/34 (2013.01);
Abstract

A probe card, a wafer testing system and a wafer testing method are provided. The wafer testing system includes a wafer holder and a probe card. A wafer is held on the wafer holder, and testing pads are formed on the wafer, in which the testing pads are arranged along a test straight line. The probe card includes probes each of which includes an arm portion and a tip portion. An included angle between the test straight line and an extension of a projection line of the arm portion onto the wafer ranges from about 40 degrees to about 55 degrees.


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Wu, Yuan-Chun. (2020). Probe card and wafer testing system and wafer testing method (U.S. Patent No. 10670654). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10670654

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