The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2020

Filed:

Dec. 14, 2018
Applicant:

Power Integrations, Inc., San Jose, CA (US);

Inventors:

Alexey Kudymov, Ringoes, NJ (US);

LinLin Liu, Hillsborough, NJ (US);

Jamal Ramdani, Lambertville, NJ (US);

Assignee:

Power Integrations, Inc., San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/40 (2006.01); H01L 21/00 (2006.01); H01L 21/285 (2006.01); H01L 29/20 (2006.01); H01L 29/778 (2006.01); H01L 29/205 (2006.01); H01L 29/417 (2006.01); H01L 23/482 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28593 (2013.01); H01L 23/482 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/41766 (2013.01); H01L 29/66462 (2013.01); H01L 29/7786 (2013.01); H01L 29/7787 (2013.01);
Abstract

A method of forming one or more contact regions in a high-voltage field effect transistor (HFET) includes providing a semiconductor material, including a first active layer and a second active layer, with a gate dielectric disposed on a surface of the semiconductor material. A first contact to the semiconductor material is formed that extends through the second active layer into the first active layer, and a passivation layer is deposited, where the gate dielectric is disposed between the passivation layer and the second active layer. An interconnect is formed extending through the first passivation layer and coupled to the first contact. An interlayer dielectric is deposited proximate to the interconnect, and a plug is formed extending into the interlayer dielectric and coupled to the first portion of the interconnect.


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