The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Nov. 17, 2015
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Ryuichi Kosuge, Tokyo, JP;
Hiroshi Sotozaki, Tokyo, JP;
Takeshi Kodera, Tokyo, JP;
Ryo Hasegawa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); B24B 37/34 (2012.01); B23K 31/02 (2006.01); B23K 37/08 (2006.01); B23K 33/00 (2006.01); B23K 101/20 (2006.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B23K 31/02 (2013.01); B23K 33/006 (2013.01); B24B 37/34 (2013.01); B23K 2101/20 (2018.08);
Abstract
There is disclosed a polishing-surface cleaning apparatus to which a polishing liquid, such as slurry, is less likely to be attached. The polishing-surface cleaning apparatus includes an arm having a fluid passage, a nozzle communicating with the fluid passage, and a weld material securing the nozzle to the arm. The weld material fills a gap between a bottom surface of the arm and an edge of a front-end surface of the nozzle.