The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Jun. 07, 2016
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-Do, KR;

Inventors:

Joo Woan Cho, Seongnam-si, KR;

Byoung Ho Cheong, Yongin-si, KR;

Oleg Prudnikov, Hwaseong-si, KR;

Jeong Kyun Na, Suwon-si, KR;

Joon-Hwa Bae, Suwon-si, KR;

Seung Hwan Lee, Seoul, KR;

Byoung Kwon Choo, Hwaseong-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD, Yongin-si, Gyeonggi-Do, unknown;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 5/30 (2006.01); G02B 27/28 (2006.01); B23K 26/354 (2014.01); G02B 27/09 (2006.01); G03F 7/20 (2006.01); B23K 26/067 (2006.01); B23K 26/073 (2006.01); G02B 5/04 (2006.01); G02B 13/02 (2006.01);
U.S. Cl.
CPC ...
B23K 26/354 (2015.10); B23K 26/067 (2013.01); B23K 26/073 (2013.01); G02B 5/04 (2013.01); G02B 5/3083 (2013.01); G02B 13/02 (2013.01); G02B 27/0905 (2013.01); G02B 27/0955 (2013.01); G02B 27/283 (2013.01); G02B 27/286 (2013.01); G03F 7/70566 (2013.01);
Abstract

A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.


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