The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2020

Filed:

Dec. 08, 2017
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Chien-Kang Hsiung, Taipei, TW;

Arvind Sundarrajan, Singapore, SG;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/56 (2006.01); H01L 21/60 (2006.01); H01L 23/31 (2006.01); H01L 23/538 (2006.01); H01L 21/66 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 25/10 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5386 (2013.01); H01L 21/76802 (2013.01); H01L 21/76829 (2013.01); H01L 22/14 (2013.01); H01L 23/3128 (2013.01); H01L 23/5384 (2013.01); H01L 24/94 (2013.01); H01L 25/0655 (2013.01); H01L 24/16 (2013.01); H01L 24/17 (2013.01); H01L 24/81 (2013.01); H01L 24/83 (2013.01); H01L 25/10 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/058 (2013.01); H01L 2224/0579 (2013.01); H01L 2224/05639 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/05684 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/18 (2013.01); H01L 2224/2919 (2013.01); H01L 2224/32225 (2013.01);
Abstract

A wafer-level bridge die is affixed with an adhesive layer to a redistribution layer (RDL) that has been temporarily bonded to a carrier. Electrical interconnects are formed on the RDL and on the bridge die and encapsulated in a first mold layer. A plurality of dies are coupled to the RDL and the bridge die such that a die is electrically connected to at least one electrical interconnect of the RDL and to at least one electrical interconnect of the bridge die. A second mold layer is formed on the first mold layer to encapsulate the plurality of dies. The temporary bond is then broken and the carrier is removed, exposing the RDL connections.


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