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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10650510 B1

PDFFull Text
Date of Patent:
May. 12, 2020

Filed:

Jul. 26, 2016

Substrate inspection apparatus and method

Applicant:

Koh Young Technology Inc., Seoul, KR;

Inventors:

Seung Ae Seo, Hwaseong-si, KR;

Yeon Hee Lee, Seoul, KR;

Won Mi Ahn, Goyang-si, KR;

Hye In Lee, Gwangmyeong-si, KR;

Jong Hui Lee, Seoul, KR;

Assignee:

KOH YOUNG TECHNOLOGY INC., Seoul, KR;

Attorney:

Kile Park Reed & Houtteman PLLC

Primary Examiner:

Fayyaz Alam

Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01B 11/26 (2006.01); G01B 11/24 (2006.01); G06T 7/60 (2017.01); G01B 11/25 (2006.01); G01B 11/27 (2006.01); G01R 31/28 (2006.01); G01N 21/956 (2006.01); H05K 13/08 (2006.01); G06T 15/20 (2011.01); G01R 31/309 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G01B 11/24 (2013.01); G01B 11/25 (2013.01); G01B 11/2513 (2013.01); G01B 11/2527 (2013.01); G01B 11/2531 (2013.01); G01B 11/26 (2013.01); G01B 11/272 (2013.01); G01N 21/956 (2013.01); G01R 31/2813 (2013.01); G06T 7/00 (2013.01); G06T 7/60 (2013.01); G06T 15/20 (2013.01); H05K 13/0815 (2018.08); G01B 2210/56 (2013.01); G01N 2021/95638 (2013.01); G01R 31/309 (2013.01); G06T 2207/10028 (2013.01); G06T 2207/20092 (2013.01); G06T 2207/30141 (2013.01);
Abstract

Disclosed are a substrate inspection apparatus and a method for displaying a component in a three-dimensional inspection of a substrate. The substrate inspection apparatus measures a substrate or an inspection target region of interest of the substrate and displays an image of components positioned within the measured region on a display unit. The image of the components displayed on the display unit may be displayed in a predetermined reference direction. The difference between the reference direction and a direction in which the actual component is disposed on the substrate is displayed in the form of a numerical value or a figure. Alternatively, the image of the component in the reference direction and the image of the actually disposed component are simultaneously displayed on a screen, and a user may convert a display method of the image by using a toggle button.

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