The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Jul. 22, 2019
Asml Netherlands B.v., Veldhoven, NL;
Asml Holding N.v., Veldhoven, NL;
Güneş Nakíbo{hacek over (g)}lu, Eindhoven, NL;
Lowell Lane Baker, Norwalk, CT (US);
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Hakki Ergün Cekli, Eindhoven, NL;
Geoffrey Alan Schultz, Shelton, CT (US);
Laurentius Johannes Adrianus Van Bokhoven, Veldhoven, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Jean-Philippe Xavier Van Damme, Wezembeek-Oppem, BE;
Christopher Charles Ward, Kensington, CA (US);
ASML Holding N.V., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A patterning apparatus for a lithographic apparatus, the patterning apparatus including a patterning device support structure configured to support a patterning device having a planar surface; a patterning device conditioning system including a first gas outlet configured to provide a first gas flow over the planar surface in use and a second gas outlet configured to provide a second gas flow over the planar surface in use, wherein the first gas outlet and the second gas outlet are arranged at different distances perpendicular to the planar surface; and a control system configured to independently control a first momentum of gas exiting the first gas outlet and a second momentum of gas exiting the second gas outlet or to independently vary the first gas flow and/or the second gas flow over the planar surface of the patterning device.