Method for applying charge-based-capacitance-measurement with switches using only nmos or only pmos transistors

Abstract

Described is a CBCM technique that works only with PMOS transistors or only with NMOS transistors. Specifically, a method of monitoring performance of an integrated circuit device using a CBCM technique is disclosed, the method comprising: providing a metrology structure having a pseudo-inverter comprising a pull-up pull-down transistor switch, wherein the transistor switch comprises a pull-up transistor and a pull-down transistor of the same type; charging and discharging a device under test (DUT) coupled to the pseudo-inverter using a non-overlapping clock; measuring capacitance of the DUT with a gate voltage of the pull-up transistor at a preset value; and, using the value of the measured capacitance to estimate a dimension of a structure in the integrated circuit device. The non-overlapping clock is generated by: turning the pull-down transistor off when the pull-up transistor is on; and, turning the pull-down transistor on when the pull-up transistor is off.