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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10636967 B1

PDFFull Text
Date of Patent:
Apr. 28, 2020

Filed:

Jul. 11, 2019

Method for manufacturing electrode and resistive random access memory

Applicant:

Winbond Electronics Corp., Taichung, TW;

Inventors:

Yi-Chung Chen, Taichung, TW;

Cheng-An Peng, Taichung, TW;

Shuo-Che Chang, Taichung, TW;

Sung-Ying Wen, Taichung, TW;

Assignee:

Winbond Electronics Corp., Taichung, TW;

Attorney:

JCIPRNET

Primary Examiner:

Tony Tran

Int. Cl.
CPC ...
H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 45/1625 (2013.01); H01L 45/04 (2013.01); H01L 45/124 (2013.01); H01L 45/1233 (2013.01); H01L 45/1253 (2013.01); H01L 45/146 (2013.01); H01L 45/16 (2013.01); H01L 45/1616 (2013.01);
Abstract

A method for manufacturing an electrode including the following steps is provided. A conductive layer is formed on a base material. A radio frequency physical vapor deposition (RF PVD) transition metal compound layer is formed on the conductive layer by using a RF PVD. A sacrificial layer is formed on the RF PVD transition metal compound layer. A planarization process is performed to remove the sacrificial layer and a portion of the RF PVD transition metal compound layer.

Find Patent Forward Citations

Chen, Yi-Chung. (2020). Method for manufacturing electrode and resistive random access memory (U.S. Patent No. 10636967). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10636967

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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