The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Jul. 05, 2018
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Yu-Chen Wei, New Taipei, TW;
Chun-Chieh Chan, Hsinchu, TW;
Chun-Jui Chu, Taoyuan, TW;
Jen-Chieh Lai, Tainan, TW;
Shih-Ho Lin, Jhubei, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method for forming a semiconductor device structure is provided. The method includes forming a first layer over a substrate. The method includes forming a stop layer over the first layer. The method includes forming a second layer over the stop layer. The method includes performing a first planarization process over the second layer until the stop layer is exposed. The method includes performing an etching process to remove the second layer, the stop layer, and an upper portion of the first layer. The method includes performing a second planarization process over the first layer.