The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Dec. 12, 2017
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A polishing apparatus which can keep a width of a polishing tool constant when a peripheral portion of a substrate is polished by the polishing tool is disclosed. The polishing apparatus includes a substrate holderconfigured to hold a substrate W and to rotate the substrate W, and a pressing padconfigured to press a polishing toolagainst a peripheral portion of the substrate W held by the substrate holder. The pressing padincludes an elastic memberhaving a pressing surfaceconfigured to press the polishing toolagainst the peripheral portion of the substrate W and a support memberconfigured to support the elastic member. The support memberhas a recessformed in a front surfaceof the support member, the elastic memberbeing capable of entering the recess