The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Mar. 20, 2018
Ebara Corporation, Tokyo, JP;
Toshiharu Nakazawa, Tokyo, JP;
Tetsuro Sugiura, Tokyo, JP;
Kohtaro Kawamura, Tokyo, JP;
Toyoji Shinohara, Tokyo, JP;
Takashi Kyotani, Tokyo, JP;
Keiichi Ishikawa, Tokyo, JP;
Seiji Kashiwagi, Tokyo, JP;
Yasuhiko Suzuki, Tokyo, JP;
Hideo Arai, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.