The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2020

Filed:

Jan. 14, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Injo Ok, Loudonville, NY (US);

Balasubramanian Pranatharthiharan, Watervliet, NY (US);

Charan V. V. S. Surisetty, Clifton Park, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/70 (2006.01); H01L 29/78 (2006.01); H01L 21/8234 (2006.01); H01L 29/06 (2006.01); H01L 21/768 (2006.01); H01L 23/485 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78 (2013.01); H01L 21/76831 (2013.01); H01L 21/76852 (2013.01); H01L 21/76865 (2013.01); H01L 21/76885 (2013.01); H01L 21/823475 (2013.01); H01L 23/485 (2013.01); H01L 29/0649 (2013.01); H01L 21/76897 (2013.01); H01L 27/088 (2013.01);
Abstract

A source/drain contact includes a first portion arranged on a substrate and extending between a first gate and a second gate; a second portion arranged on the first portion and extending over the first gate and the second gate, the second portion including a partially recessed liner and a metal disposed on the partially recessed liner, and the partially recessed liner arranged on an endwall of the second portion and in contact with the first portion; and an oxide disposed around the second portion and on the first gate and the second gate.


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